In article number 2003252, Libo Ma, Oliver G. Schmidt, and co‐workers develop a dry‐release approach for the rolling up of strained nanomembranes, for the fabrication of electronic and optical devices. This approach results in in high yield, reproducibility, and uniformity, and represents a major step toward wafer‐scale integration of microdevices.

中文翻译：

---

自组装：通过干蚀刻制造的晶圆级高质量微管器件，用于光学和微电子应用（Adv。Mater。37/2020）

Libo Ma，Oliver G. Schmidt及其同事在编号为2003252的文章中开发了一种干式释放方法，用于卷绕应变的纳米膜，用于制造电子和光学设备。这种方法可实现高产量，可重复性和均匀性，是朝着微器件晶圆级集成迈出的重要一步。