In recent years, the development of perovskite solar cells (PSCs) is advancing along the way, and the efficiency is comparable to traditional silicon‐based solar cells. However, as crucial factors in the road to commercialization, stability and upscaling manufacture have not been fully investigated yet. To solve these problems, the exploration of charge transport layer (CTL) is clearly imminent, which is critical to the stability of PSCs. Among them, inorganic metal oxides have better stability than organic CTL. Particularly, the atomic layer deposition (ALD) process can fabricate dense and scalable metal oxides based on the self‐limiting surface reaction. This perspective focuses on the recent progress of ALD‐grown metal oxides in PSCs: both of electron and hole transport layer; connection layer in tandem architectures; application in semi‐transparent perovskite solar cells (ST‐PSCs); prospective of commercialization feasibility of the ALD‐grown metal oxides in ST‐PSCs.

中文翻译：

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钙钛矿太阳能电池中金属氧化物的原子层沉积：现在和将来

近年来，钙钛矿太阳能电池（PSC）的发展也在不断发展，其效率可与传统的硅基太阳能电池相媲美。然而，作为商业化道路上的关键因素，稳定性和升级制造尚未得到充分研究。为了解决这些问题，电荷传输层（CTL）的探索迫在眉睫，这对于PSC的稳定性至关重要。其中，无机金属氧化物具有比有机CTL更好的稳定性。特别是，原子层沉积（ALD）工艺可以基于自限表面反应制造致密且可扩展的金属氧化物。该观点集中于PSC中ALD生长的金属氧化物的最新进展：电子和空穴传输层；串联架构中的连接层；在半透明钙钛矿太阳能电池（ST-PSC）中的应用；在ST-PSC中使用ALD生长的金属氧化物的商业化可行性前景广阔。