Though widely applied in various technological areas, the knowledge about the molecular behavior of poly‐p‐xylylene and its derivatives prepared via chemical vapor deposition polymerization is still far from comprehensive, as for this polymer the characterization is limited due to the insolubility in most common solvents. This report presents the investigation of the swelling properties of aminomethyl‐functionalized poly‐p‐xylylene as a means to elucidate the influence of various process parameters on the structural properties of the polymer layer. The swelling of films with varying thickness, storage time and conditions, thermal treatment and deposited by varying the temperature of the deposition stage is measured. To gain deeper insight into the origin of the observed effects, the swelling measurements by spectroscopic ellipsometry are complemented using additional characterization methods.

中文翻译：

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胺基官能化聚对二甲苯的溶胀特性表征可评估基于气相的聚合物薄膜的分子变化

尽管已广泛应用于各个技术领域，但有关通过化学气相沉积聚合法制备的聚对二甲苯及其衍生物的分子行为的知识仍远远不够全面，因为对于该聚合物，由于在大多数情况下不溶性，其表征受到限制溶剂。本报告氨甲基官能聚的溶胀性能的调查p-亚二甲苯，旨在阐明各种工艺参数对聚合物层结构性能的影响。通过改变沉积阶段的温度来测量具有变化的厚度，储存时间和条件，热处理和沉积的薄膜的溶胀。为了更深入地了解所观察到的效应的来源，使用其他的表征方法对通过光谱椭偏仪进行的溶胀测量进行了补充。