Energy storage technologies are developed over the past decades, such as metal-air batteries. The large-scale application of these devices is finite due to slow kinetics of the oxygen evolution reaction (OER). In order to solve this issue, plasma enhanced atomic layer deposition (PE-ALD) is used to synthesize high performance nano-oxide (NiO_x@Co₃O₄/CC) electrocatalyst for OER applications. Herein, the cobalt oxide (Co₃O₄) nanowire arrays are grown on oxygen plasma-treated carbon-cloth (CC) and then a thin layer (~1.2 nm) of nickel oxide (NiO_x) is deposited on the Co₃O₄/CC through PE-ALD method. The electrocatalyst of two transition metal oxides plays a leading role in improving the OER performance and stability. The overpotential for OER of NiO_x@Co₃O₄/CC electrocatalyst is 360 mV at 10 mA cm⁻², which is much lower than that of Co₃O₄/CC (420 mV) and comparable to commercial RuO₂ (350 mV) electrocatalyst. Moreover, the stability of NiO_x@Co₃O₄/CC electrocatalyst is also improved, which only 8.85% of the initial current is loss after 40,000 s. It is demonstrated that PE-ALD synthesis method provides a facile approach to fabricate highly efficient nano-oxide electrocatalysts for OER in energy storage devices.

储能技术在过去的几十年中得到了发展，例如金属空气电池。由于放氧反应（OER）的动力学缓慢，这些装置的大规模应用是有限的。为了解决该问题，使用等离子体增强原子层沉积（PE-ALD）合成用于OER应用的高性能纳米氧化物（NiO _x @Co ₃ O ₄ / CC）电催化剂。这里，氧化钴（钴₃ ö ₄）纳米线阵列的生长在氧等离子体处理的碳布（CC），然后薄层氧化镍（氧化镍（〜1.2纳米）_X）沉积在共₃ ö ₄/ CC通过PE-ALD方法。两种过渡金属氧化物的电催化剂在改善OER性能和稳定性方面起着主导作用。NiO _x @Co ₃ O ₄ / CC电催化剂的OER超电势在10 mA cm ^-2时为360 mV，远低于Co ₃ O ₄ / CC（420 mV），可与商业RuO ₂（350 mV）电催化剂。此外，NiO _x @Co ₃ O ₄的稳定性/ CC电催化剂也得到了改进，在40,000 s后损耗仅为初始电流的8.85％。结果表明，PE-ALD合成方法为制备储能装置中OER的高效纳米氧化物电催化剂提供了一种简便的方法。