International Journal of Precision Engineering and Manufacturing ( IF 1.9 ) Pub Date : 2020-09-14 , DOI: 10.1007/s12541-020-00401-0 Peixing Ning , Ji Zhao , Shijun Ji , Jingjin Li , Handa Dai
Due to its excellent optical performance and system integration property, micro-nano structure function surface has been widely used in optical apparatus and energy collection equipment. But using traditional processing method can’t obtain a mirror-like surface with high form accuracy and low roughness for sake of its complex micro-nano structure. In this paper, a large amplitude umbrella surface is special designed and single point diamond turning (SPDT) technology based on slow tool servo (STS) is used for umbrella surface machining. The tool path generation, tool radius compensation and tool geometry optimization are detailed for fabricating the desired surface. A new method combined with constant angle and analytical mathematical optimization is proposed for tool path optimization. A large amplitude umbrella surface with the maximum amplitude 0.2 mm and period 8 per cycle is designed, and the machining experiment is carried out on Nanoform 250 ultra-precision machine tool. From the form accuracy 1 μm in surface residual error and 279.12 nm in RMS and the surface roughness 230.10 nm in Ra for the machined surface, it can be seen that a large amplitude umbrella surface is easily fabricated by SPDT under STS controlling.
中文翻译:
基于慢速刀具伺服的大振幅伞面超精密加工
由于其优良的光学性能和系统集成性能,微纳结构功能面已被广泛应用于光学设备和能量收集设备中。但是,由于其复杂的微纳米结构,使用传统的加工方法无法获得具有高形状精度和低粗糙度的镜面表面。本文对大幅度伞面进行了特殊设计,并基于慢刀伺服(STS)的单点金刚石车削(SPDT)技术用于伞面加工。详细说明了刀具路径生成,刀具半径补偿和刀具几何形状优化,以制造所需的表面。提出了一种结合恒定角度和解析数学优化的新方法来进行刀具路径优化。设计了一个大振幅的伞面,其最大振幅为0.2 mm,每个周期的周期为8,并在Nanoform 250超精密机床上进行了机加工实验。从加工后表面的表面精度误差为1μm,RMS值为279.12 nm,Ra的表面粗糙度为Ra。230.10 nm,可以看出,在STS控制下,SPDT易于制造大振幅的伞面。