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Correlation between Langmuir Probe and Spectroscopic Temperatures in Inductively Coupled Neon–Argon Mixture Plasma
Plasma Physics Reports ( IF 1.1 ) Pub Date : 2020-09-10 , DOI: 10.1134/s1063780x20080036
Z. I. Khattak , A. W. Khan , A. U. Rahman , M. Shafiq

Abstract

In this study, many plasma parameters including excitation temperature \(({{T}_{{{\text{exc}}}}})\), electron temperature \(({{T}_{e}})\), skin depth \(({{\delta }_{p}})\), plasma potential \(({{V}_{p}})\), and electron energy distribution function (EEDF) are inspected in the two modes of magnetic pole enhanced-inductively coupled (MaPE-ICP) neon–argon mixture plasma by employing Langmuir probe (LP) and optical emission spectroscopy (OES) diagnostics. The major purpose of this effort is to explore the validity of spectroscopic temperatures, including excitation temperature \((kT_{{{\text{exc}}}}^{{{\text{OES}}}})\) and electron temperature (\(kT_{e}^{{{\text{OES}}}}\)) as a substitute diagnostic tool to the measured electron temperature \((T_{e}^{{{\text{LP}}}})\) by Langmuir probe. The spectroscopic and LP temperatures are measured in various input powers and argon contents in the discharge. It is observed that LP and spectroscopic temperatures both display falling dependence with input power and argon content, but the spectroscopic temperature is consistently lesser than the probe temperature.This study can be very useful in reactive plasma processing, where the LP has many limitations.



中文翻译:

电感耦合氖-氩混合等离子体中Langmuir探针与光谱温度之间的相关性

摘要

在这项研究中,许多等离子体参数包括激发温度\(({{T} _ {{{\ text {exc}}}}})\),电子温度\(({{T} _ {e}})\\ ),皮肤深度\(({{\ delta __ {p}})\),等离子体电势\(({{V} _ {p}})\)和电子能量分布函数(EEDF)通过使用Langmuir探针(LP)和光发射光谱法(OES)诊断,两种模式的磁极增强感应耦合(MaPE-ICP)氖氩混合物等离子体。这项工作的主要目的是探索光谱温度的有效性,包括激发温度\((kT _ {{{text {exc}}}} ^ {{{{text {OES}}}}})\)和电子温度(\(kT_ {e} ^ {{{\ text {OES}}}} \\))作为Langmuir探针测得的电子温度\((T_ {e} ^ {{{\ text {LP}}}})\)的替代诊断工具。在各种输入功率和放电中的氩含量下测量光谱和LP温度。观察到LP和光谱温度都显示出与输入功率和氩气含量的下降相关性,但光谱温度始终低于探针温度。这项研究在LP有很多局限性的反应等离子体处理中可能非常有用。

更新日期:2020-09-11
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