We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 µm away from the microresonator, has a footprint size of 200 µm × 400 µm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.

中文翻译：

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集成了微加热器的高Q微谐振器中谐振波长的片内调谐

我们报告了与片上微型加热器集成的高质量（高Q）因子的微环形谐振器的制造。微型谐振器和微型加热器都是使用飞秒激光三维（3-D）微加工制造的。微型加热器位于距微型谐振器约200 µm的位置，占地面积为200 µm×400 µm。通过改变施加在微型加热器上的电压已经实现了微谐振器中谐振波长的调谐。集成芯片的响应时间少于10秒。