Owing to high accuracy in the whole measurement range, the compensator-rotating method is a powerful technique for transmission/reflection ellipsometric measurements. The compensator-rotating imaging ellipsometer, which is a system combing the optical microscope and single measurement point ellipsometer, faces non-ideal measurement conditions involving nonuniformity of the retardation across the compensator. In this paper, we study the effect of non-ideal measurement conditions on the measurement noises and introduce the systematic solution.

中文翻译：

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与补偿器延迟不均匀相关的椭圆偏振成像测量噪声

由于在整个测量范围内都具有很高的精度，因此补偿器旋转方法是用于透射/反射椭偏测量的强大技术。补偿器旋转成像椭圆仪是将光学显微镜和单测量点椭圆仪结合在一起的系统，它面对非理想的测量条件，涉及整个补偿器的延迟不均匀。在本文中，我们研究了非理想测量条件对测量噪声的影响，并介绍了系统的解决方案。