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Numerical Study of the Thresholds of Sputtering of Metals during Bombardment with Low-Energy Ions
Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2020-07-16 , DOI: 10.3103/s1062873820060118 V. V. Evstifeev , N. V. Kostina
中文翻译:
低能离子轰击过程中金属溅射阈值的数值研究
更新日期:2020-07-16
Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2020-07-16 , DOI: 10.3103/s1062873820060118 V. V. Evstifeev , N. V. Kostina
Abstract
The transfer of energy from bombarding \({{{\text{K}}}^{ + }}\) and \({\text{A}}{{{\text{r}}}^{ + }}\)ions ( = 10–100 eV) to vanadium atoms is studied via molecular dynamics using the Vs potential. The threshold energy of vanadium sputtering is determined, and a numerical way of determining the thresholds of sputtering for solids is proposed.中文翻译:
低能离子轰击过程中金属溅射阈值的数值研究