Abstract High performance control requires high loop gain and large control bandwidth. However, the spurious resonances at the higher frequencies can limit the performance of such type of systems. This drawback can be overcome by using sensor fusion technique. In sensor fusion, two or more sensors are combined in synergy such that good performance is achieved at lower frequencies while ensuring robustness of the system at higher frequencies. This paper presents a new technique, termed as “virtual sensor fusion”, in which only one of the sensors is physically installed on the system while the other sensor is simulated virtually. The virtual sensor is selected based on desired high frequency response. The effectiveness of the proposed technique is demonstrated numerically for a case of active seismic isolation. A robustness analysis of virtual sensor fusion is also carried out in order to study its stability in the presence of spurious resonances. Finally, the technique is experimentally verified on active isolation of pendulum system from ground motion. The results obtained demonstrate good isolation performance at lower frequencies and robustness to plant uncertainties (spurious resonances) at higher frequencies. This technique can be effectively used for high precision control of sensitive instruments.

中文翻译：

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用于高精度控制的虚拟传感器融合

摘要 高性能控制需要高环路增益和大控制带宽。然而，较高频率的寄生谐振会限制此类系统的性能。这个缺点可以通过使用传感器融合技术来克服。在传感器融合中，两个或多个传感器协同组合，从而在较低频率下实现良好性能，同时确保系统在较高频率下的稳健性。本文介绍了一种称为“虚拟传感器融合”的新技术，其中只有一个传感器物理安装在系统上，而另一个传感器则进行虚拟仿真。基于所需的高频响应选择虚拟传感器。所提出的技术的有效性在一个主动隔震的情况下被数值证明。还进行了虚拟传感器融合的鲁棒性分析，以研究其在存在虚假共振的情况下的稳定性。最后，该技术在摆系统与地面运动的主动隔离方面进行了实验验证。获得的结果证明了在较低频率下良好的隔离性能和在较高频率下对工厂不确定性（杂散共振）的鲁棒性。该技术可有效用于敏感仪器的高精度控制。获得的结果证明了在较低频率下良好的隔离性能和在较高频率下对工厂不确定性（杂散共振）的鲁棒性。该技术可有效用于敏感仪器的高精度控制。获得的结果证明了在较低频率下良好的隔离性能和在较高频率下对工厂不确定性（杂散共振）的鲁棒性。该技术可有效用于敏感仪器的高精度控制。