Abstract On-site C2F4 gas production from CF4 feedstock gas was achieved using pure CF4 plasma at a moderate pressure (40–200 Torr) and a relatively low gas temperature. The decomposition of CF4 and the generation of perfluorocarbon gases with a larger number of carbon atoms were investigated by gas-phase Fourier-transform infrared spectroscopy. The generated perfluorocarbon gases were C2F6 and C2F4, and more C2F4 was generated than C2F6. The dependence of the CF4 decomposition efficiency and the C2F4 generation behavior on various plasma-generation parameters, such as the input power, gas flow rate, and process pressure, was investigated. It was found that contact of the graphite material with the CF4 plasma was important for efficient C2F4 generation. In addition, a moderately elevated graphite temperature was necessary to produce C2F4 gas efficiently. The surface reaction between graphite and fluorine-related species is important for C2F4 production from pure CF4 feedstock gas.

中文翻译：

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中压纯四氟甲烷等离子体反应器现场生成四氟乙烯气体

摘要 使用纯 CF4 等离子体在中等压力 (40–200 Torr) 和相对较低的气体温度下，从 CF4 原料气现场生产 C2F4 气体。通过气相傅里叶变换红外光谱研究了 CF4 的分解和具有大量碳原子的全氟化碳气体的生成。生成的全氟化碳气体为C2F6和C2F4，生成的C2F4多于C2F6。研究了 CF4 分解效率和 C2F4 生成行为对各种等离子体生成参数（例如输入功率、气体流速和工艺压力）的依赖性。发现石墨材料与 CF4 等离子体的接触对于有效生成 C2F4 很重要。此外，要有效地生产 C2F4 气体，需要适度升高石墨温度。石墨和氟相关物种之间的表面反应对于从纯 CF4 原料气生产 C2F4 很重要。