We have determined the local plasma parameters using the Langmuir probe measurements with a sub-microsecond time resolution during positive voltage pulses of a bipolar high-power impulse magnetron sputtering discharge using an unbalanced magnetron with a titanium target. The effects of the positive voltage pulse amplitude and the delay between the negative voltage pulse end and the positive voltage pulse initiation are investigated as well as the spatial dependence of the plasma parameters at three distances from the target. From the results, the values of the average energy flux of ions during the positive voltage pulse to the substrate are estimated. We have found that the time evolution of the plasma parameters has similar developments which are independent of the positive voltage pulse parameters and the distance from the target, although the values of the plasma parameters are different. During the initial part of the positive voltage pulse, a large difference (up to 200 V)...

中文翻译：

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由Langmuir探针以亚微秒时间分辨率确定的双极性HiPIMS放电的正电压脉冲中的等离子体参数

我们已经使用Langmuir探针测量结果确定了局部等离子体参数，该测量结果在使用带有钛靶的不平衡磁控管的双极大功率脉冲磁控管溅射放电的正电压脉冲期间具有亚微秒的时间分辨率。研究了正电压脉冲幅度以及负电压脉冲端与正电压脉冲启动之间的延迟的影响，以及距目标三个距离的等离子体参数的空间依赖性。根据该结果，可以估计出在正电压脉冲下到达基板的离子的平均能量通量的值。我们发现，等离子体参数的时间演变具有相似的发展，而与正电压脉冲参数和距目标的距离无关，尽管血浆参数的值不同。在正电压脉冲的初始阶段，相差很大（最高200 V）...