In this study, we investigated the temperature dependence of the initial deformation and cracks of indium tin oxide (ITO) thin films deposited on a fused silica substrate using a 1064-nm quasi-continuous-wave laser. We observed that the laser-induced morphology threshold of the film shows a dramatic thickness effect. The laser-induced morphology threshold of a 100-nm ITO film is four times that of a 300-nm ITO film. Initial laser-induced surface morphologies of the initial deformation and cracks will occur as long as temperature rises to about 520 K and 1250 K, respectively, irrespective of the thickness of a film. Experimental results indicate that a thin ITO film is more likely to tolerate laser irradiation because of lower absorptivity than a thicker ITO film. Studying the temperature effect helps clarify more about the laser annealing process, which is a promising process in improving the performance of the ITO films.

中文翻译：

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准连续波激光辐照氧化铟锡薄膜初始变形和裂纹的温度依赖性

在这项研究中，我们使用 1064 nm 准连续波激光器研究了沉积在熔融石英衬底上的氧化铟锡 (ITO) 薄膜的初始变形和裂纹的温度依赖性。我们观察到薄膜的激光诱导形态阈值显示出显着的厚度效应。100 nm ITO 薄膜的激光诱导形态阈值是 300 nm ITO 薄膜的四倍。只要温度分别升至约 520 K 和 1250 K，无论薄膜的厚度如何，都会出现初始变形和裂纹的初始激光诱导表面形貌。实验结果表明，与较厚的 ITO 膜相比，薄 ITO 膜更可能耐受激光照射，因为吸收率较低。研究温度效应有助于更多地了解激光退火过程，