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Determination of the surface topography of ball end micro milled material measures
Engineering Science and Technology, an International Journal ( IF 5.7 ) Pub Date : 2020-09-01 , DOI: 10.1016/j.jestch.2020.08.005
Katja Groß , Matthias Eifler , Katja Klauer , Katharina Huttenlochner , Benjamin Kirsch , Christiane Ziegler , Jan Christian Aurich , Jörg Seewig

Abstract Micro milling is a common process for micro structuring component surfaces, e.g. for manufacturing material measures that are applied for the calibration of areal surface topography measuring instruments. In this study, the surface topography of material measures is investigated using various evaluation approaches (integral approach, correlation analysis, Fourier analysis). In doing so, confocal microscope and atomic force microscope measurements are used to compare cutting parameters for the appropriate micro milling process. For two milling tools it is shown that the surface topography depends primarily on the spindle speed and much less on the feed per tooth whereas differences between the milling tools are observed in the tendency to form substructures.

中文翻译:

球头微铣削材料表面形貌的测定

摘要 微铣削是微结构部件表面的常用工艺,例如用于制造用于校准面状表面形貌测量仪器的材料测量。在这项研究中,使用各种评估方法(积分法、相关分析、傅立叶分析)研究了材料测量的表面形貌。在此过程中,共聚焦显微镜和原子力显微镜测量用于比较适当微铣削工艺的切削参数。对于两种铣刀,表明表面形貌主要取决于主轴速度,而与每齿进给量的关系要小得多,而铣刀之间的差异则体现在形成子结构的趋势上。
更新日期:2020-09-01
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