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A thin transferable blue light-emitting diode by electrochemical lift-off
Nano Express Pub Date : 2020-08-26 , DOI: 10.1088/2632-959x/abb07d
Yaonan Hou 1 , Yong Wang 2 , Qingkang Ai 3
Affiliation  

We demonstrate a transferable blue light-emitting diode (LED) fabricated using a cost-effective approach. By means of solution-based electrochemical etching, an ultrathin free-standing membrane can be obtained from a commercial III-nitride LED wafer. The membrane, containing a full LED structure (including p-/n-type layers and multiple quantum wells) epitaxially grown on a sapphire substrate, is transferable to foreign substrates with a simple lift-off process facilitated by electrochemical etching. After fabrication, optical properties of the thin film are massively improved, accompanied by a 17-fold enhanced photoluminescence normal to the film surface. Prototype transferable blue LEDs are realized on both a copper-coated glass substrate and a polypropylene substrate. The devices exhibit a high performance with bright emission at 447 nm under electrical injection at room temperature.

中文翻译:

通过电化学剥离形成的可转移的薄型蓝色发光二极管

我们演示了使用具有成本效益的方法制造的可转移的蓝色发光二极管(LED)。通过基于溶液的电化学蚀刻,可以从商业化的III族氮化物LED晶片获得超薄的自支撑膜。该膜包含在蓝宝石衬底上外延生长的完整LED结构(包括p- / n型层和多个量子阱),可通过电化学蚀刻促进的简单剥离工艺将其转移到异质衬底。制作后,薄膜的光学性能得到了极大的改善,同时垂直于薄膜表面的光致发光增强了17倍。可原型转移的蓝色LED在镀铜玻璃基板和聚丙烯基板上均实现。
更新日期:2020-08-31
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