The physical properties of electronic devices made by 2,6‐diphenyl anthracene (DPA) are influenced by the microtexture of DPA surfaces. This work focused on the experimental investigation of the 3‐D surface microtexture of DPA thin films deposited on OTS (octadecyltrichlorosilane), HMDS (Hexamethyldisilasane), OTMS (octadecyltrimethoxysilane), and Si/SiO₂ (300 nm SiO₂ thickness) substrates with 5 and 50 nm thicknesses and 5 and 10 μm scan size. The thin film surfaces were recorded using atomic force microscopy (AFM) and their images were stereometrically analyzed to obtain statistical parameters, in accordance with ASME B46.1‐2009 and ISO 25178‐2: 2012. The results showed the effect of different manufacturing parameters on microtexture values where the granular structure is confirmed in all films. In addition, root mean square is increased by increasing the thickness from 5 to 50 nm for all types of substrates.

中文翻译：

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通过原子力显微镜评估纳米级的2,6-二苯基蒽薄膜的表面形貌变化。

由2,6-二苯基蒽（DPA）制成的电子设备的物理性能受DPA表面微观结构的影响。这项工作的重点是对沉积在OTS（十八烷基三氯硅烷），HMDS（六甲基二硅氮烷），OTMS（十八烷基三甲氧基硅烷）和Si / SiO ₂（300 nm SiO ₂）上的DPA薄膜的3D表面微观结构进行实验研究厚度）的基板，其厚度为5和50 nm，扫描尺寸为5和10μm。根据ASME B46.1-2009和ISO 25178-2：2012，使用原子力显微镜（AFM）记录薄膜表面并对其图像进行立体分析以获得统计参数。结果显示了不同制造参数的影响在所有薄膜上均确认有颗粒结构的微观纹理值上。另外，通过将所有类型的基板的厚度从5 nm增加到50 nm，可以增加均方根。