Low Temperature μ-Si layers have been deposited by Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) to produce strain gauges. These strain gauges performed on 25 μm thick flexible Kapton Polyimide (PI) were investigated in terms of Gauge Factor but also in dynamic mode through a homemade pneumatic test bench. Best strain gauge design has been identified and subsequently used to perform a 25 sensor array which was also tested using pulses and more complex signals. A simulation of blood pressure monitoring was performed to demonstrate the value of the technology.

中文翻译：

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柔性基板上的μ-Si应变仪阵列，用于动态压力测量

低温μ-Si层已通过电感耦合等离子体化学气相沉积（ICP-CVD）进行了沉积，以生产应变仪。这些应变仪是在25μm厚的柔性Kapton聚酰亚胺（PI）上进行测量的，不仅通过量规因数进行测试，还通过自制的气动测试台以动态模式进行了研究。确定了最佳应变仪设计，随后将其用于执行25个传感器阵列，该阵列也已使用脉冲和更复杂的信号进行了测试。进行了血压监测模拟，以证明该技术的价值。