In this research, the Si thin wire has been assembled on a glass trench to be a bridged resonator, which has the potential to measure multi-dimensional force by the combination of strain sensing and field effect transistor (FET) sensing using the mechanical vibration. The Si thin wire was designed to be the suitable structure to improve the detectable minimum force and measurement time. Analysing the current spectrum flowing in the resonator, the vibration measurement using the strain sensing and FET sensing, was demonstrated in a single dimension. The resonant frequency was observed by the spectrum of the current flowing in Si thin wire, which was observed at the same frequency by a laser Doppler vibrometer. Using the gate electrode, the additionally modulated current was observed. The effective and faster force mapping measurements using magnetic resonance force microscopy are expected by the proposed multi-dimensional force detection.

中文翻译：

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基于组装好的硅细线的桥式谐振器

在这项研究中，Si细线已组装在玻璃沟槽上以形成桥式谐振器，该桥具有通过使用机械振动进行应变感应和场效应晶体管（FET）感应相结合来测量多维力的潜力。Si细线被设计为合适的结构，以改善可检测的最小力和测量时间。通过分析在谐振器中流动的电流频谱，可以在一维显示使用应变感应和FET感应的振动测量结果。通过在硅细线中流动的电流的频谱来观察谐振频率，该频谱通过激光多普勒振动计在相同的频率处观察到。使用栅电极，观察到另外调制的电流。