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Irradiation effects of 6 mev-electrons on optical and electrical properties of TiO2/Al2o3 multilayer thin films
Radiation Effects and Defects in Solids ( IF 1 ) Pub Date : 2020-08-28 , DOI: 10.1080/10420150.2020.1812072
P. Laha 1 , S. K. Mahapatra 2 , I. Banerjee 3 , V. N. Bhoraskar 4
Affiliation  

We report the irradiation effects on rf reactive magnetron sputter deposited TiO2/Al2O3 hetero-structured thin films. These films are irradiated with 6 MeV electron beams by maintaining the dose ra...

中文翻译:

6 mev电子辐照对TiO2/Al2o3多层薄膜光电性能的影响

我们报告了辐照对 rf 反应磁控溅射沉积的 TiO2/Al2O3 异质结构薄膜的影响。通过保持剂量范围,用 6 MeV 电子束照射这些薄膜。
更新日期:2020-08-28
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