A valve has a function of controlling the flow of a fluid by opening or closing a passage. A valve can thus be used to create different pressures for the two areas on either side of the valve. However, the conventional vacuum valve has a problem that the flow rate of the gas cannot be controlled. In this light, it is necessary to develop a vacuum valve that is capable of precisely controlling the flow rate of the gas without leakage of the gas. Recently, we developed a variable conductance vacuum valve to control the inlet pressure for the vacuum chamber. The variable conductance valve developed in this study uses a similar iris structure to that of conventional control valves employed in normal water and sewage pipes, but the valve has no outer mounting hole or fastening holes for coupling the driving parts because the iris structure is changed in a non-contact manner by a magnetic field. Therefore, the valve in this study has the advantage that the fluid leakage of the valve can be completely blocked without a separate device such as packing or sealing components or an O-ring, and therefore, the internal vacuum state can be maintained. The fabricated valve showed a relative repeatability error within 0.5% and a relative reproducibility error within 5%. These results demonstrate that the conductance variable valve developed in this study is suitable for easily changing the pressure inside a vacuum chamber by adjusting the conductance.

阀具有通过打开或关闭通道来控制流体的流动的功能。因此，阀可用于为阀两侧的两个区域产生不同的压力。但是，传统的真空阀具有不能控制气体流速的问题。鉴于此，有必要开发一种真空阀，其能够精确地控制气体的流量而不会泄漏气体。最近，我们开发了一种可变电导率的真空阀来控制真空室的入口压力。在这项研究中开发的可变电导阀使用的虹膜结构与普通自来水和污水管道中使用的常规控制阀类似，但是该阀没有外部安装孔或用于连接驱动部件的紧固孔，因为虹膜结构通过磁场以非接触方式改变。因此，本研究中的阀具有以下优点：无需单独的装置（例如填料或密封组件或O形圈）就可以完全阻止阀的流体泄漏，因此可以保持内部真空状态。制成的阀显示出相对重复性误差在0.5％以内，相对再现性误差在5％以内。这些结果表明，在本研究中开发的电导可变阀适合于通过调节电导来容易地改变真空室内的压力。本研究中的阀门具有以下优点：无需单独的装置（例如填料或密封组件或O形圈），就可以完全阻止阀门的流体泄漏，因此可以保持内部真空状态。制成的阀显示出相对重复性误差在0.5％以内，相对再现性误差在5％以内。这些结果表明，在本研究中开发的电导可变阀适合于通过调节电导来容易地改变真空室内的压力。本研究中的阀门具有以下优点：无需单独的装置（例如填料或密封组件或O形圈），就可以完全阻止阀门的流体泄漏，因此可以保持内部真空状态。制成的阀显示出相对重复性误差在0.5％以内，相对再现性误差在5％以内。这些结果表明，在本研究中开发的电导可变阀适合于通过调节电导来容易地改变真空室内的压力。