This paper presents comparison analysis of the surface texture properties measured by a Sensofar S Neox 3D optical profilometer, an Alicona Infinite Focus SL optical measuring system and a digital Keyence VHX-6000 microscope on the example of assessing of the Ti6Al4V titanium alloy surface after finish turning under dry machining conditions. 2D and 3D surface parameters were analyzed and surface profiles and average percentage changes in parameters tested are demonstrated. Different measurement areas were used. Measuring differences of up to ~30% were observed between methods tested. In the 2D mode, the best possibilities are offered smaller measuring areas as observed for Alicona Infinite Focus SL and Keyence VHX-6000. In the 3D mode, larger measuring areas for Sensofar S Neox 3D provides better options compared to smaller measuring areas for Alicona Infinite Focus SL. Surface profiles analyses using the Sensofar S Neox 3D and Keyence VHX-600 show similar results.

本文以Sensofar S Neox 3D光学轮廓仪，Alicona Infinite Focus SL光学测量系统和数字Keyence VHX-6000显微镜为例，对完成车削后的Ti6Al4V钛合金表面评估后的表面纹理特性进行了比较分析。在干式加工条件下。分析了2D和3D表面参数，并显示了测试参数的表面轮廓和平均百分比变化。使用了不同的测量区域。在所测试的方法之间观察到高达〜30％的测量差异。在2D模式下，如Alicona Infinite Focus SL和Keyence VHX-6000所观察到的，最佳的测量范围较小。在3D模式下，与用于Alicona Infinite Focus SL的较小测量区域相比，用于Sensofar S Neox 3D的较大测量区域提供了更好的选择。使用Sensofar S Neox 3D和Keyence VHX-600进行的表面轮廓分析显示出相似的结果。