Abstract. Traceable, highly accurate calibration of wavefront sensors such as Shack–Hartmann sensors is a challenging task and an active field of research. We have developed a measurement system for the traceable calibration of wavefront sensors employing spherical wavefronts and a point light source in combination with a three-axis linear stage. We obtain an absolute calibration of sensor errors, including the reference spot position and wavefront gradient-dependent errors for each microlens individually. We discuss the main error influences and present an initial measurement uncertainty budget for the calibration. The calibration can be performed with an expanded measurement uncertainty (95% coverage interval) of better than 5 μrad for the wavefront gradient deviation.

中文翻译：

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采用球面波前的 Shack-Hartmann 波前传感器的可溯源校准

摘要。Shack-Hartmann 传感器等波前传感器的可追踪、高精度校准是一项具有挑战性的任务，也是一个活跃的研究领域。我们开发了一种测量系统，用于波前传感器的可追溯校准，该系统采用球面波前和点光源与三轴线性平台相结合。我们获得了传感器误差的绝对校准，包括每个微透镜的参考光斑位置和波前梯度相关误差。我们讨论了主要的误差影响，并提出了校准的初始测量不确定度预算。可以在波前梯度偏差优于 5 μrad 的扩展测量不确定度（95% 覆盖区间）下执行校准。