Abstract Appropriate antireflection coating (ARC) stacks are known for their excellent antireflection performances. In this paper, TiO2–SiO2/SiO2/SiNx ARC stacks in multicrystalline silicon (Mc-Si) solar cells were designed and prepared to improve the performances of the cells under the encapsulation condition. To this end, the parameters of each ARC were firstly calculated and optimized by matrix method and SunSolve™. The SiNx and SiO2 ARCs were deposited by plasma enhanced chemical vapor deposition (PECVD). The TiO2–SiO2 was effectively applied as ARCs by sol-gel method. The as-obtained ARC stacks were characterized by various analytical methods and their applications on Mc-Si solar cells were evaluated. The microstructures show that the as-obtained ARC stacks have good uniformity and TiO2–SiO2 exists in amorphous form. The TiO2–SiO2/SiO2/SiNx ARC stacks on Mc-Si solar cells has excellent light transmission, exhibiting the low weighted average reflectivity of 5.88% in the wavelength range of 300–1200 nm under encapsulation conditions. The as-obtained ARC stacks significantly enhanced the photovoltaic performances of Mc-Si solar cells under encapsulation conditions, for example, achieving an average practical efficiency of 16.27%. New and effective TiO2–SiO2/SiO2/SiNx ARC stacks would offer a promising possibility for the production of high-performance Mc-Si solar cells.

中文翻译：

---

封装条件下减反射涂层(TiO2-SiO2/SiO2/SiNx)对多晶硅太阳能电池性能影响的研究

摘要 合适的抗反射涂层 (ARC) 堆栈以其出色的抗反射性能而闻名。在本文中，设计并制备了多晶硅 (Mc-Si) 太阳能电池中的 TiO2-SiO2/SiO2/SiNx ARC 叠层，以提高封装条件下电池的性能。为此，首先通过矩阵法和 SunSolve™ 计算和优化了每个 ARC 的参数。SiNx 和 SiO2 ARC 是通过等离子体增强化学气相沉积 (PECVD) 沉积的。通过溶胶-凝胶法，TiO2-SiO2 被有效地用作 ARC。所获得的ARC堆栈通过各种分析方法进行表征，并评估了它们在Mc-Si太阳能电池上的应用。微观结构表明，所获得的 ARC 叠层具有良好的均匀性，并且 TiO2-SiO2 以无定形形式存在。Mc-Si 太阳能电池上的 TiO2–SiO2/SiO2/SiNx ARC 堆栈具有优异的透光率，在封装条件下在 300–1200 nm 的波长范围内表现出 5.88% 的低加权平均反射率。所获得的ARC堆栈显着提高了封装条件下Mc-Si太阳能电池的光伏性能，例如，实现了16.27%的平均实际效率。新型有效的 TiO2-SiO2/SiO2/SiNx ARC 堆栈将为高性能 Mc-Si 太阳能电池的生产提供有希望的可能性。所获得的ARC堆栈显着提高了封装条件下Mc-Si太阳能电池的光伏性能，例如，实现了16.27%的平均实际效率。新型有效的 TiO2-SiO2/SiO2/SiNx ARC 堆栈将为高性能 Mc-Si 太阳能电池的生产提供有希望的可能性。所获得的ARC堆栈显着提高了封装条件下Mc-Si太阳能电池的光伏性能，例如，实现了16.27%的平均实际效率。新型有效的 TiO2-SiO2/SiO2/SiNx ARC 堆栈将为高性能 Mc-Si 太阳能电池的生产提供有希望的可能性。