Fabricating flexible pressure sensors with high sensitivity in a broad pressure range is still a challenge. Herein, a flexible pressure sensor with engineered microstructures on polydimethylsiloxane (PDMS) film is designed. The high performance of the sensor derives from its unique pyramid‐wall‐grid microstructure (PWGM). A square array of dome‐topped pyramids and crossed strengthening walls on the film forms a multiheight hierarchical microstructure. Two pieces of PWGM flexible PDMS film, stacked face‐to‐face, form a piezoresistive sensor endowed with ultrahigh sensitivity across a very broad pressure range. The sensitivity of the device is as high as 383 665.9 and 269 662.9 kPa⁻¹ in the pressure ranges 0–1.6 and 1.6–6 kPa, respectively. In the higher pressure range of 6.1–11 kPa, the sensitivity is 48 689.1 kPa⁻¹, and even in the very high pressure range of 11–56 kPa, it stays at 1266.8 kPa⁻¹. The pressure sensor possesses excellent bending and torsional strain detection properties, is mechanically durable, and has potential applications in wearable biosensing for healthcare. In addition, 2 × 2 and 4 × 4 sensor arrays are prepared and characterized, suggesting the possibility of manufacturing a flexible tactile sensor.

中文翻译：

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挠性压力传感器的工程微结构派生分层变形在宽压力范围内引起超灵敏压阻特性

制造在宽压力范围内具有高灵敏度的柔性压力传感器仍然是一个挑战。本文中，设计了一种在聚二甲基硅氧烷（PDMS）膜上具有经过设计的微结构的柔性压力传感器。传感器的高性能源自其独特的金字塔墙网格微结构（PWGM）。胶片上的正方形圆顶穹顶和交叉的加强墙形成了多层的多层微观结构。面对面堆叠的两块PWGM柔性PDMS膜形成了压阻传感器，在非常宽的压力范围内具有超高的灵敏度。设备的灵敏度高达383 665.9和269 662.9 kPa ^-1分别在0–1.6和1.6–6 kPa的压力范围内。在6.1–11 kPa的较高压力范围内，灵敏度为48 689.1 kPa ^-1，即使在11–56 kPa的非常高的压力范围内，灵敏度仍为1266.8 kPa ^-1。压力传感器具有出色的弯曲和扭转应变检测性能，机械耐用，并且在医疗保健的可穿戴生物传感中具有潜在的应用。另外，准备并表征了2×2和4×4传感器阵列，这暗示了制造柔性触觉传感器的可能性。