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Prototype edge-grown nanowire sensor array for the real-time monitoring and classification of multiple gases
Journal of Science: Advanced Materials and Devices ( IF 7.382 ) Pub Date : 2020-09-01 , DOI: 10.1016/j.jsamd.2020.05.005
Nguyen Xuan Thai , Nguyen Van Duy , Chu Manh Hung , Hugo Nguyen , Matteo Tonezzer , Nguyen Van Hieu , Nguyen Duc Hoa

Abstract The monitoring and classification of different gases using a single resistive semiconductor sensor are challenging because of the similar response characteristics. An array of separated sensors can be used as an electronic nose, but such arrays have a bulky structure and complex fabrication processes. Herein, we easily fabricated a gas-sensor array based on edge-grown SnO2 nanowires for the real-time monitoring and classification of multiple gases. The array comprised four sensors and was designed on a glass substrate. SnO2 nanowires were grown on-chip from the edge of electrodes, made contact together, and acted as sensing elements. This method was advantageous over the post-synthesis technique because the SnO2 nanowires were directly grown from the edge of the electrodes rather than on the surface. Accordingly, damage to the electrode was avoided by alloying Sn with Pt at a high growth temperature. The sensing characteristics of the sensor array were further examined for different gases, including methanol, isopropanol, ethanol, ammonia, hydrogen sulphide and hydrogen. Radar plots were used to improve the selective detection of different gases and enable effective classification.

中文翻译:

用于多种气体实时监测和分类的边缘生长纳米线传感器阵列原型

摘要 由于相似的响应特性,使用单个电阻半导体传感器对不同气体进行监测和分类具有挑战性。一组分离的传感器可用作电子鼻,但此类阵列结构庞大且制造工艺复杂。在这里,我们轻松地制造了基于边缘生长的 SnO2 纳米线的气体传感器阵列,用于多种气体的实时监测和分类。该阵列包括四个传感器,并设计在玻璃基板上。SnO2 纳米线从电极边缘在芯片上生长,接触在一起,并充当传感元件。这种方法优于后合成技术,因为 SnO2 纳米线直接从电极边缘而不是在表面上生长。因此,通过在高生长温度下将 Sn 与 Pt 合金化,避免了对电极的损坏。针对不同的气体,包括甲醇、异丙醇、乙醇、氨、硫化氢和氢气,进一步检查了传感器阵列的传感特性。雷达图用于改进对不同气体的选择性检测并实现有效分类。
更新日期:2020-09-01
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