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Study on water absorption characteristics of cubic Y2O3 films
Optical Materials ( IF 3.9 ) Pub Date : 2020-11-01 , DOI: 10.1016/j.optmat.2020.110304
Meng Guo , Kui Yi , Shuying Shao , Yuhui Zhang , Guohang Hu , Jiaoling Zhao , Hongbo He , Jianda Shao

Abstract Based on the electron beam evaporation with oxygen plasma assistance, Y2O3 films were prepared at different deposition temperatures and oxygen flow rates. X-ray diffraction showed that all deposited Y2O3 films had cubic phase with (2 2 2) plane preferred orientation. Spectrometer test results showed that water absorption decreases in transmittance and reflectance around the wavelength of 2.9 μm. According to Lorentz dispersion theory, a multi-oscillator model was established to calculate optical constants and the inhomogeneity of Y2O3 films in the wavelength range from 2.5 to 4 μm. The results indicate an abnormal dispersion phenomenon is appearing in the 2.5–4 μm wavelength region. It was found that under the same oxygen flow rate, higher substrate temperature leads to a greater refractive index and smaller extinction coefficient. When the oxygen flow rate is increased at the same substrate temperature, the extinction coefficient remains almost unchanged, while the refractive index decreases. In addition, the refractive index and the inhomogeneity of the films increase almost linearly as the grain size increases.

中文翻译:

立方Y2O3薄膜吸水特性研究

摘要 基于氧等离子体辅助电子束蒸发,在不同的沉积温度和氧气流速下制备了Y2O3薄膜。X射线衍射表明,所有沉积的Y2O3薄膜都具有立方相,具有(2 2 2)面择优取向。光谱仪测试结果表明,吸水率在 2.9 μm 波长附近的透射率和反射率降低。根据洛伦兹色散理论,建立了多振荡器模型来计算Y2O3薄膜在2.5~4μm波长范围内的光学常数和不均匀性。结果表明,在 2.5-4 μm 波长范围内出现了异常色散现象。发现在相同的氧气流速下,衬底温度越高,折射率越大,消光系数越小。在相同衬底温度下增加氧气流量时,消光系数几乎保持不变,而折射率降低。此外,随着晶粒尺寸的增加,薄膜的折射率和不均匀性几乎呈线性增加。
更新日期:2020-11-01
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