In this paper, we present a new design of electrostatically actuated nonlinear impact resonator with a capacitive seesaw structure to solve the problem of short circuit, stiction and chaotic motion. The device is driven by electrostatic force on the capacitors, which utilizes nonlinear behavior and creates a pull-in effect. The seesaw structure can be set into oscillation with only a DC power source and a resistor, which is proved by a prototype device. No stiction occurred in over 10 h of experimental time, thus demonstrating the feasibility of solving the breakdown and stiction problem. A static mathematical model was established, solved, and verified by the experiment results, and a dynamic model with floating charge was analyzed. The analysis reveals the working principle of the proposed seesaw capacitive structure as an electrostatically actuated nonlinear impact resonator, and indicates that the working voltage can be decreased to less than 25 V if the oscillator dimensions are decreased to micrometers. The seesaw structure has considerable potential application for autonomous sensors.

在本文中，我们提出了一种具有电容跷跷板结构的静电驱动非线性冲击谐振器的新设计，以解决短路，静摩擦和混沌运动的问题。该器件由电容器上的静电力驱动，这利用了非线性行为并产生了拉入效应。跷跷板结构可以通过仅直流电源和电阻器设置为振荡，这已通过原型设备证明。在超过10小时的实验时间内没有发生粘连，因此证明了解决击穿和粘连问题的可行性。通过实验结果建立，求解和验证了静态数学模型，并对带有浮动电荷的动态模型进行了分析。分析揭示了所提出的跷跷板电容结构作为静电驱动的非线性冲击谐振器的工作原理，并表明如果将振荡器尺寸减小到微米，则工作电压可以减小到小于25V。跷跷板结构对于自主传感器具有巨大的潜在应用。