Emission spectra from multiply-charged Sn 5+ –Sn 10+ ions are recorded from an electron beam ion trap (EBIT) and from laser-produced plasma (LPP) in the extreme ultraviolet range relevant for nanolithographic applications. Features in the wavelength regime between 12.6 and 20.8 nm are studied. Using the Cowan code, emission line features of the charge-state-resolved Sn ion spectra obtained from the EBIT are identified. Emission features from tin LPP either from a liquid micro-droplet or planar solid target are subsequently identified and assigned to specific charge states using the EBIT data. For the planar solid tin target, the 4 d –5 p transitions of Sn 8+ –Sn 10+ ions are shown to dominate the long-wavelength part of the measured spectrum and transitions of type 4 d –4 f + 4 p –4 d are visible in absorption. For the droplet target case, a clear increase in the charge state distribution with increasing lase...

中文翻译：

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电子束离子阱中Sn 5 + –Sn 10 +离子的EUV光谱和激光产生的等离子体

从电子束离子阱（EBIT）和激光产生的等离子体（LPP）记录了多电荷Sn 5+ -Sn 10+离子的发射光谱，该光谱与纳米光刻应用有关。研究了波长范围在12.6和20.8 nm之间的特征。使用Cowan码，识别从EBIT获得的电荷状态分辨的Sn离子光谱的发射线特征。随后识别来自液态微滴或平面固体靶标的锡LPP的发射特征，并使用EBIT数据分配给特定的电荷状态。对于平面固体锡靶，Sn 8+ –Sn 10+离子的4 d –5 p跃迁显示出占被测光谱的长波部分和4 d –4 f + 4 p –4型跃迁占主导地位d在吸收中可见。对于液滴目标情况，