Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek’s Law. The MEMS switch can be transferred from “off” to “on” through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30–60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10–50 μm and the discharge gap between the two electrodes needs to be 9–11 μm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 μm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 μm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements.

静电、恒流和强电磁信号等异常电压会错误地触发引信中的MEMS烟火和控制系统的操作，从而可能导致人员伤亡。本研究结合非对称电场的电晕气体放电理论和皮克定律，设计了一种固态微尺度开关。MEMS 开关可以通过电晕电极之间的气体击穿从“关闭”转换为“开启”。在模型中，两个电极之一是球形的，另一个是平面的，因此在电极周围形成了不均匀的电场。理论工作如下。首先得到球形电极的曲率半径、放电间隙与空气击穿电压的关系；满足驱动 MEMS 开关所需的低电压 (30–60 V)，球形电极的曲率半径需要为10-50μm，两个电极之间的放电间隙需要为9-11μm。其次，引入最优比率 ε 来参数化模型。最后，通过比较理论和电场模拟结果，确定电晕放电结构参数。然后通过 MEMS 工艺制造开关。搭建硬件测试平台，对性能芯片进行测试。发现当电极间隙为9 μm时，静电电压至少为37.3 V，实际空气击穿电压与理论空气击穿电压的误差为2.6%。当电极间隙为 11 μm 时，静电电压至少为 42.3 V，实际空气击穿电压与理论空气击穿电压之间的误差为 10.5%。两种情况均满足设计要求。