Rapid diagnosis and treatment are required when blood clots build up in a blood vessel and clog up the vessel. This study proposes novel smart catheters that can simultaneously diagnose and treat blood vessel disease. This quick treatment increases survival probability and can prevent various complications. In the design of the smart catheters, Pt strain gauges can be used to measure the inside diameter of the vessel. This paper proposes a new fabrication process of the Pt strain gauges based on metal substrates made of Ni and Co alloy (referred to as “Ni-Co” in this paper). In the fabrication process, a Ni-Co thin film was deposited onto a silicon carrier wafer by electroplating and patterned into individual shapes by a liftoff process. Then, a multilayered Pt strain gauge consisting of insulation, adhesive layers, and Pt metallization was formed on the Ni-Co flexible substrate. Subsequently, the Pt strain gauges were peeled off from the carrier wafer by a new release process. To evaluate the performance of the strain gauges in terms of gauge factor and nonlinearity, tensile and compression tests were conducted by attaching Pt strain gauges to the constant stress beam.

中文翻译：

---

基于Ni-Co金属基底的铂应变仪在智能导管中的应用

当血栓在血管中积聚并阻塞血管时，需要快速诊断和治疗。这项研究提出了可以同时诊断和治疗血管疾病的新型智能导管。这种快速治疗增加了生存率，并可以预防各种并发症。在智能导管的设计中，可以使用Pt应变仪测量血管的内径。本文提出了一种基于镍和钴合金（本文称为“ Ni-Co”）金属基底的Pt应变仪的新制造工艺。在制造过程中，通过电镀将Ni-Co薄膜沉积到硅载体晶片上，并通过剥离工艺将其图案化为单个形状。然后，由绝缘层，粘合层，在Ni-Co柔性基板上形成Pt金属化层。随后，通过新的释放工艺将Pt应变仪从载体晶圆上剥离下来。为了评估应变计在应变系数和非线性方面的性能，通过将Pt应变计连接到恒定应力梁上进行了拉伸和压缩测试。