Due to the emerging applications of ultra-high precision scanning in many engineering fields, dynamical tracking of desired reference trajectories for nano-stages has attracted a lot of significant research. An adaptive integral sliding mode control (AISMC) framework in combination with frequency-shaped optimization and hysteresis observer is proposed to improve tracking performance of piezoelectric nano-stages in this article, where hysteresis nonlinearities, undesired high-frequency dynamics and model uncertainties are the major issues that limit high-precision dynamic tracking. The convergence regarding both the observation error of the hysteresis state and the tracking error of the considered system is analyzed. By comparison with representative results in the literature, the experimental studies conducted on an multi-axis nano-stage are used to verify the proposed approach has a substantial improvement in terms of robustness and tracking performance.

由于超高精度扫描在许多工程领域中的新兴应用，对纳米级所需参考轨迹的动态跟踪吸引了许多重要的研究。本文提出了一种自适应积分滑模控制（AISMC）框架，结合频率形状优化和磁滞观测器，以改善压电纳米级的跟踪性能，其中磁滞非线性，不良的高频动力学和模型不确定性是主要问题限制高精度动态跟踪的问题。分析了关于磁滞状态的观测误差和所考虑系统的跟踪误差的收敛性。通过与文献中的代表性结果进行比较，