Abstract

The morphology, composition, and chemical state of coating elements based on titanium nitride (TiN) formed by the method of condensation with ion bombardment at different modes on Hadfield steel substrates (110G13L grade) have been studied by the methods of SEM, EDX, and XPS. It has been established that, in the formed coatings, the highest titanium content was in the composition of nitride and oxynitride, whereas there was also a certain amount of titanium and titanium oxides chemically bonded to carbon. It has been shown that titanium in the metallic state was absent for all the studied modes of coating formation and, therefore, the drop macrofraction formation did not proceed at these conditions. XPS layer-by-layer analysis demonstrated that coatings had a heterogeneous composition over depth. The microhardness of samples was studied by the Vickers test. The highest microhardness values were observed for the samples with coatings formed for 35 and 50 min, presumably as the result of higher content of compounds of the TiN_xC_yO_z type with higher hardness than that of TiN.

中文翻译：

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离子轰击缩合形成的TiN基涂层的化学成分和力学性能

摘要

用SEM，EDX和EDX方法研究了哈德菲尔德钢基体（110G13L）在不同模式下通过离子轰击缩合方法形成的氮化钛（TiN）基涂层元素的形貌，组成和化学状态。 XPS。已经确定，在所形成的涂层中，最高的钛含量是在氮化物和氧氮化物的组成中，而同时还存在一定量的化学键合到碳上的钛和氧化钛。已经表明，在所有研究的涂层形成方式中都没有金属态的钛，因此，在这些条件下不会进行大液滴的形成。XPS逐层分析表明，涂层在深度范围内具有异质成分。通过维氏试验研究了样品的显微硬度。观察到形成涂层35和50分钟的样品的最高显微硬度值可能是TiN化合物含量较高的结果_x C _y O _z型，硬度高于TiN。