Optical characterization of small samples over a wide spectral range with rapid data acquisition is essential for the analysis of many material systems, such as 2D van der Waals layers and their heterostructures. Here, we present the design and implementation of a tabletop micro-spectroscopy system covering the near-infrared to the vacuum-ultraviolet (1.2 eV-6.8 eV or ∼1.0 μm to 185 nm) using mostly off-the-shelf components. It can measure highly reproducible local reflectance spectra with a total integration time of a few minutes and a full-width-half-maximum spot size of 2.7 by 5.6 μm. For precise positioning, the design also allows simultaneous monitoring of the measurement location and the wide-field image of the sample. We demonstrate ultra-broadband reflectance spectra of exfoliated thin flakes of several wide-gap 2D materials, including ZnPS3, hexagonal BN, and Ca(OH)2.

中文翻译：

---

从近红外延伸到真空紫外的高分辨率光学显微光谱

在宽光谱范围内对小样品进行快速数据采集的光学表征对于分析许多材料系统至关重要，例如 2D 范德华层及其异质结构。在这里，我们介绍了一种桌面微光谱系统的设计和实现，该系统主要使用现成的组件，涵盖近红外到真空紫外（1.2 eV-6.8 eV 或 ~1.0 μm 到 185 nm）。它可以以几分钟的总积分时间和 2.7 x 5.6 μm 的全宽半最大光斑尺寸测量高度重现的局部反射光谱。为了精确定位，该设计还允许同时监测测量位置和样品的宽视野图像。我们展示了几种宽隙二维材料的剥落薄片的超宽带反射光谱，