The stability theory of the inductively coupled plasma (ICP) is developed for the case when the electron quiver velocity in RF wave is of the order of or is larger than the electron thermal velocity. The theory predicts the existence the instabilities of the ICP which are driven by the current formed in the skin layer by the accelerated electrons, which move relative ions under the action of the ponderomotive force.

中文翻译：

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表层中形成的有质电子电流驱动的电感耦合等离子体的离子-声不稳定性

电感耦合等离子体(ICP)的稳定性理论是针对射频波中电子颤动速度等于或大于电子热速度的情况发展起来的。该理论预测ICP的不稳定性是由加速电子在表层中形成的电流驱动的，这些电子在有质动力的作用下移动相关离子。