The nonlinear mechanical response of an electrostatically actuated doubly-clamped micro-actuator assuming a non-contact based actuation arrangement is examined. The electrostatic actuating force is numerically approximated through solving a nonlinear electrical field problem using a finite-elements based analysis. An electro-mechanical model is established within the framework of the Euler–Bernoulli continuous nonlinear beam theory, where both the nonlinear geometric mid-plane stretching and the nonlinear electric forcing effects have been both taken into consideration. Then, assuming a Galerkin’s based modal expansion technique, the structural behavior of the micro-actuator under the effect of the resultant electric out-of-plane fields is solved numerically. The resultant nonlinear reduced-order model equations are examined to get the deflection of the microbeam against an assumed bias voltage for different vertical initial gap sizes. The snap-through and pull-out voltages of the micro-system are calculated for different assumed initial vertical gap separation. Frequency diagrams are analyzed against any applied DC bias voltage through solving a linearized eigenvalue problem. Thorough parametric simulations indicate a prospect of such bi-stable design of the micro-actuator with large stroke and high fundamental frequency enabling it to be potentially useful for MEMS based high frequency energy harvester devices with bi-stable capabilities.

研究了基于非接触式致动装置的静电致动双钳位微致动器的非线性机械响应。通过使用基于有限元的分析来解决非线性电场问题，可以在数值上近似静电致动力。在欧拉-伯努利连续非线性梁理论的框架内建立了一个机电模型，其中同时考虑了非线性几何中间平面拉伸和非线性电动强迫效应。然后，假设采用基于Galerkin的模态扩展技术，则在数值上解决了微促动器在所​​得平面外电场作用下的结构行为。检查所得的非线性降阶模型方程，以获取针对不同垂直初始间隙大小的微束相对于假定偏置电压的挠度。针对不同的假定初始垂直间隙间隔，计算了微系统的击穿电压和拉出电压。通过解决线性化特征值问题，针对任何施加的直流偏置电压分析了频率图。透彻的参数仿真表明，这种具有大行程和高基频的微执行器的双稳态设计前景十分广阔，这使其有可能对具有双稳态功能的基于MEMS的高频能量采集器设备有用。针对不同的假定初始垂直间隙间隔，计算了微系统的击穿电压和拉出电压。通过解决线性化特征值问题，针对任何施加的直流偏置电压分析了频率图。全面的参数仿真表明，这种具有大行程和高基频的微执行器的双稳态设计前景十分广阔，这使其有可能对具有双稳态功能的基于MEMS的高频能量采集器设备有用。针对不同的假定初始垂直间隙间隔，计算了微系统的击穿电压和拉出电压。通过解决线性化特征值问题，针对任何施加的直流偏置电压分析了频率图。全面的参数仿真表明，这种具有大行程和高基频的微执行器的双稳态设计前景十分广阔，这使其有可能对具有双稳态功能的基于MEMS的高频能量采集器设备有用。