The fabrication and integration of microactuators with 3D micromechanisms are necessary to develop microrobots with higher capability and complexity. In this work, a two-step fabrication method combining 3D printing with two-photon polymerization (TPP) and aluminum sputtering is demonstrated. Actuators using two different transduction mechanisms (thermal and electrostatic) were fabricated in this process, and a thermal actuator was printed with a mechanism in three-dimensional space without additional assembly steps. This work also provides parameterized characterizations which can be used as design guidelines for building actuators and mechanisms. A design approach to electrically isolate the actuators from the substrate is introduced so that the device can be functional after two fabrication steps without patterning the metal layer. Metal coverage on the sidewalls of trenches are characterized, which provides a design space for deciding electrode gaps and heights in electrostatic actuators. Using these guidelines, 500 $\mu \text{m}$ long thermal actuators showed a maximum displacement of 18.0 $\mu \text{m}$ at 8.31mW and reliably actuated up to 8,500 cycles. An interdigitated electrostatic comb-drive actuator was also successfully demonstrated, displacing 12.7 $\mu \text{m}$ when 160V was applied. Finally, a 3D actuated mechanism was designed by incorporating a thermal actuator with 3D compliant mechanisms to flap 250 $\mu \text{m}$ long wings. Flapping motion was successfully demonstrated. [2020-0010]

中文翻译：

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3D 打印微致动器的两步制造方法：表征和驱动机制

具有 3D 微机构的微致动器的制造和集成对于开发具有更高能力和复杂性的微型机器人是必要的。在这项工作中，展示了一种将 3D 打印与双光子聚合 (TPP) 和铝溅射相结合的两步制造方法。在这个过程中制造了使用两种不同转换机制（热和静电）的执行器，并且热执行器在 3D 空间中打印了一个机制，无需额外的组装步骤。这项工作还提供了参数化特征，可用作构建执行器和机构的设计指南。引入了一种将致动器与基板电隔离的设计方法，以便该设备可以在两个制造步骤后运行，而无需对金属层进行图案化。对沟槽侧壁上的金属覆盖进行表征，这为决定静电致动器中的电极间隙和高度提供了设计空间。使用这些指南，500 $\mu \text{m}$ 长热致动器的最大位移为 18.0 $\mu \text{m}$ 功率为 8.31mW，可靠启动高达 8,500 次循环。还成功展示了叉指式静电梳状驱动执行器，取代了 12.7 $\mu \text{m}$ 当施加 160V 时。最后，通过将带有 3D 顺应机构的热致动器结合到襟翼 250 上，设计了 3D 致动机构 $\mu \text{m}$ 长翅膀。成功演示了扑翼运动。[2020-0010]