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FPCB Masked One-Step Etching Large Aperture Mirror for LiDAR
Journal of Microelectromechanical Systems ( IF 2.7 ) Pub Date : 2020-08-01 , DOI: 10.1109/jmems.2020.3000154
Hui Zuo , Siyuan He

This paper presents a Flexible Printed Circuit Board (FPCB) masked one-step etching large aperture mirror for Light Detection and Ranging (LiDAR). A FPCB structure is bonded on a thin silicon wafer ( $50\sim 200~\mu \text{m}$ thick) coated with a 100 nm thick metal film and one-step of DRIE is used to etch the wafer with the FPCB structure as the mask and the metal film as the stop layer. The simple fabrication process and 0.1 mm (instead of $< 1~\mu \text{m}$ needed for microfabrication) resolution photolithography lead to a very low cost of a few dollars. Copper coils embedded in the FPCB structure are attached to the backside of the large aperture mirror plate, instead of beside the mirror plate as the case in MEMS magnetic mirrors, to generate a high magnetic force and achieve a relatively high frequency considering the large aperture and high thickness. Modeling and prototyping of two designs, Mirror_A and Mirror_B, are presented to verify the novel mirror technology. LiDAR applications of the novel mirror technology are demonstrated and tested. Achieved performances are: Mirror_A, aperture $12 \times 12$ mm, oscillation frequency of 510 Hz, field of view (FOV) of 30° and radius of curvature (ROC) of 10 m; Mirror_B aperture $24 \times 24$ mm, oscillation frequency of 160 Hz, FOV of 20° and ROC of 10 m. [2020-0085]

中文翻译:

用于 LiDAR 的 FPCB 掩膜一步蚀刻大孔径反射镜

本文介绍了一种用于光检测和测距 (LiDAR) 的柔性印刷电路板 (FPCB) 掩膜一步蚀刻大孔径反射镜。FPCB结构粘合在薄硅片上( $50\sim 200~\mu \text{m}$ 厚)涂一层100nm厚的金属膜,用DRIE一步法刻蚀晶圆,以FPCB结构为掩膜,金属膜为停止层。简单的制造工艺和 0.1 毫米(而不是 $< 1~\mu \text{m}$ 微细加工所需)分辨率光刻导致几美元的非常低的成本。FPCB结构中嵌入的铜线圈贴在大孔径镜板的背面,而不是像MEMS磁镜那样在镜板旁边,以产生高磁力并实现相对较高的频率,考虑到大孔径和高厚度。展示了 Mirror_A 和 Mirror_B 两种设计的建模和原型设计,以验证新颖的镜像技术。演示和测试了新型镜面技术的 LiDAR 应用。实现的性能有:Mirror_A,光圈 $12 \times 12$ mm,振荡频率为 510 Hz,视场 (FOV) 为 30°,曲率半径 (ROC) 为 10 m;Mirror_B孔径 $24 \times 24$ mm,振荡频率为 160 Hz,FOV 为 20°,ROC 为 10 m。[2020-0085]
更新日期:2020-08-01
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