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Vibration-resistant interference microscope with assistant focusing for on-machine measurement of surface topography
Precision Engineering ( IF 3.6 ) Pub Date : 2020-07-31 , DOI: 10.1016/j.precisioneng.2020.07.008
Qian Liu , Hui Zhang , Xiaojin Huang , Kaihua Cui , Lulu Li , Xiaobin Yue

The interference microscope is a powerful tool for surface topography measurement, but its high sensitivity to vibration hinders its application to on-machine use. To measure surface roughness on a machine for the ultra-precision machining, a vibration-resistant interference microscope (VRIM) with an assistant focusing function is developed. The basic principle of VRIM is an error-compensated phase-shifting interferometry. An iterative algorithm is presented to calculate the surface phase with the phase shift amounts as unknown variables, where the phase shift amounts are calculated and compensated with least-squares method. A narrow bandwidth illumination is employed to alleviate coherence envelop influence, and a simplified intensity model is established to decouple the variables. Assisting the microscope to find fringe quickly, the focusing is realized by introducing an off-axis thin beam to generate two spots, of which their relative position relates to the defocus. The focusing method is directional and determinant, and has a large range up to 0.3 mm. In the vibration disturbances of 0.2 μm and 0.4 μm amplitudes over 0 Hz to 20 Hz frequency region, the roughness accuracy and repeatability of measuring an ultra-precision machined surface are both up to the sub-nanometer level. The developed instrument is applied to a single-point diamond turning machine and achieves a sub-nanometer accuracy and repeatability.



中文翻译:

带有辅助聚焦的抗振干涉显微镜,用于在机表面测量表面形貌

干涉显微镜是进行表面形貌测量的有力工具,但是其对振动的高灵敏度阻碍了其在机上使用。为了在用于超精密加工的机器上测量表面粗糙度,开发了具有辅助聚焦功能的抗振干涉显微镜(VRIM)。VRIM的基本原理是误差补偿相移干涉术。提出了一种迭代算法,以相移量作为未知变量来计算表面相,其中相移量通过最小二乘法进行计算和补偿。采用窄带宽照明来减轻相干包络的影响,并建立简化的强度模型以解耦变量。协助显微镜快速找到边缘,通过引入离轴细光束产生两个光斑来实现聚焦,这两个光斑的相对位置与散焦有关。聚焦方法是方向性的和确定性的,并且具有高达0.3 mm的较大范围。在0 Hz至20 Hz频率范围内振幅为0.2μm和0.4μm的振动干扰中,测量超精密加工表面的粗糙度精度和可重复性均达到亚纳米水平。开发的仪器应用于单点金刚石车床,可实现亚纳米精度和可重复性。在0 Hz至20 Hz频率范围内的振幅为4μm,测量超精密加工表面的粗糙度精度和可重复性均达到亚纳米水平。开发的仪器应用于单点金刚石车床,可实现亚纳米精度和可重复性。在0 Hz至20 Hz频率范围内的振幅为4μm,测量超精密加工表面的粗糙度精度和可重复性均达到亚纳米水平。开发的仪器应用于单点金刚石车床,可实现亚纳米精度和可重复性。

更新日期:2020-07-31
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