In this paper, we present the optical and electrical properties of surface-patterned GaAs-based Multiquantum Well (MQW) light emitting diodes (LEDs) with one- and two-dimensional photonic crystal (PhC) structures. Optical properties were analyzed in the near and far field, measured by a near-field scanning optical microscope and with a goniophotometer. We demonstrated a strong effect of patterned PhC on the radiation properties and the light extraction efficiency. Enormous surface emission enhancement reaching 110% confirmed the strong effect of the patterned structure on the coupling of the guided modes into the surface emission. Additionally, the considerable effect of the PhC structure diffraction on radiation pattern was confirmed in the near and far field and is in good agreement with the simulated shape of the optical field.

中文翻译：

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用EBL图案化具有1D和2D PhC的LED的发射特性的复杂分析

在本文中，我们介绍了具有一维和二维光子晶体（PhC）结构的基于表面图案的GaAs基多量子阱（MQW）发光二极管（LED）的光学和电学性质。通过近场扫描光学显微镜和测角光度计在近场和远场中分析光学性质。我们展示了图案化的PhC对辐射性能和光提取效率的强大影响。达到110％的巨大表面发射增强证实了图案化结构对引导模式耦合到表面发射中的强大作用。另外，在近场和远场中都证实了PhC结构衍射对辐射方向图的显着影响，并且与光场的模拟形状非常吻合。