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Improving sensing properties of entangled carbon nanotube-based gas sensors by atmospheric plasma surface treatment
Microelectronic Engineering ( IF 2.3 ) Pub Date : 2020-08-01 , DOI: 10.1016/j.mee.2020.111403
Neelakandan M. Santhosh , Aswathy Vasudevan , Andrea Jurov , Anja Korent , Petr Slobodian , Janez Zavašnik , Uroš Cvelbar

Abstract Entangled multi-walled carbon nanotubes (MWCNTs) on polyurethane (PUR) after Ar plasma-treatment and He plasma-treatment have been tested as gas sensors for ethanol sensing. It was found that plasma-treated sensors exhibit higher sensitivity compared to the non-treated samples along with different ethanol concentration. Non-treated sensors exhibit similar sensor response with the increase in ethanol concentration, while Ar plasma-treated sensors displays ~5 times improvement and He plasma-treated sensors show ~3 times improvement with an increase in ethanol concentration. The sensitivity of the plasma-treated sensors is also stable for following two-weeks after the preparation compared to the non-treated sensor. Entangled nanotube network exhibits a significant shift in the baseline resistance after both plasma-treatments. The response time of the sensor was increased after the plasma-treatment, while the recovery was rather quick. Surface analyses revealed that plasma-treatment did not make any significant morphological changes. Thus, the improvements in stability and sensitivity after plasma-treatment are attributed to the plasma-enhanced surface modification and formation of functional bonds on the surface of nanotubes, which are sensitive to the ethanol vapour.

中文翻译:

通过大气等离子体表面处理改善缠结碳纳米管基气体传感器的传感性能

摘要 经 Ar 等离子体处理和 He 等离子体处理后在聚氨酯 (PUR) 上缠结的多壁碳纳米管 (MWCNT) 已被测试作为用于乙醇传感的气体传感器。结果表明,与未经处理的样品以及不同的乙醇浓度相比,经过等离子体处理的传感器表现出更高的灵敏度。未经处理的传感器随着乙醇浓度的增加表现出相似的传感器响应,而经过 Ar 等离子体处理的传感器显示出约 5 倍的改善,而经过 He 等离子体处理的传感器随着乙醇浓度的增加表现出约 3 倍的改善。与未经处理的传感器相比,经过等离子体处理的传感器的灵敏度在制备后的两周内也保持稳定。在两种等离子体处理后,缠结的纳米管网络表现出基线电阻的显着变化。等离子体处理后传感器的响应时间增加,而恢复相当快。表面分析表明,等离子体处理没有产生任何显着的形态变化。因此,等离子体处理后稳定性和灵敏度的提高归因于等离子体增强的表面改性和纳米管表面功能键的形成,纳米管对乙醇蒸汽敏感。
更新日期:2020-08-01
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