The precision tools equipped with active vibration isolation platform in high-tech facilities are sensitive to low-frequency vibration. Currently, there are neither standards nor rules to select th...

中文翻译：

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低频瞬态振动谱分析综述

高科技设施中配备主动隔振平台的精密工具对低频振动很敏感。目前，既没有标准也没有规则来选择...