We investigated the effects of substrate rotation speed on the structural and mechanical properties of CrN/CrAlSiN multilayer coatings produced using high-power impulse magnetron sputtering (HiPIMS) on silicon and high-speed steel (HSS) substrates. Structural analysis and characterization of the multilayer coatings were performed using an X-ray diffractometer (XRD), field emission scanning electron microscopy (FE-SEM), an electron probe microanalyzer (EPMA), and a transmission electron microscope (TEM). The thickness of the bi-layer film depended on the substrate rotation speed, as follows: 12 (1.5 rpm), 9.5 (2 rpm), 6 (3 rpm), 4 (4 rpm), and 3.2 nm (5 rpm). The results revealed that the hardness and coating–substrate adhesion strength increased inversely with the thickness of the bi-layer. TEM analysis revealed smaller columnar structures in thinner CrN/CrAlSiN multilayer coatings. The highest results for hardness (20.1 GPa), elastic modulus (336 GPa), and adhesion strength (77 N) were obtained at a substrate rotation speed of 5 rpm. We also investigated the adhesion properties of the multilayer structures and formulated a hypothesis to explain adhesion strength.

中文翻译：

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基板转速对大功率脉冲磁控溅射制备CrN / CrAlSiN多层涂层结构和附着性能的影响

我们研究了基材旋转速度对在硅和高速钢（HSS）基材上使用高功率脉冲磁控溅射（HiPIMS）生产的CrN / CrAlSiN多层涂层的结构和力学性能的影响。使用X射线衍射仪（XRD），场发射扫描电子显微镜（FE-SEM），电子探针显微分析仪（EPMA）和透射电子显微镜（TEM）对多层涂层进行结构分析和表征。双层膜的厚度取决于基材的旋转速度，如下所示：12（1.5 rpm），9.5（2 rpm），6（3 rpm），4（4 rpm）和3.2 nm（5 rpm）。结果表明，硬度和涂层与基底的粘合强度与双层厚度成反比。TEM分析表明，在较薄的CrN / CrAlSiN多层涂层中，圆柱结构较小。在5 rpm的基板转速下，硬度（20.1 GPa），弹性模量（336 GPa）和粘合强度（77 N）最高。我们还研究了多层结构的粘附性能，并提出了一个假设来解释粘附强度。