Abstract This article addresses the method of sensing mechanical quantities, in particular force and pressure, without the electrical connection of the sensing element and the electronics. The information about the mechanical quantity is transmitted only by evaluating the changes in the electromagnetic field created around the sensor. The sensor is designed on the basis of a flexible micro-electro-mechanical element (MEMS), the resonance of which carries the information about the measured quantity.

中文翻译：

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机械量非接触式传感的新方法

摘要 本文介绍了在没有传感元件和电子设备的电气连接的情况下传感机械量的方法，特别是力和压力。只有通过评估传感器周围产生的电磁场的变化才能传输有关机械量的信息。该传感器基于柔性微机电元件 (MEMS) 设计，其共振携带有关测量量的信息。