Abstract An experimental study of the structure of waves excited in the low-pressure inductive radio-frequency discharge located in the magnetic field with inductance less than 70 Gs was carried out. A plasma source consisting of gas-discharge and process chambers was used in the work. The results of the wave structure study showed that a partially traveling wave was excited in the plasma source when a certain threshold value of the induction of an external magnetic field was exceeded and when a metal flange separating the gas discharge and processing chambers was used. It was also noted that the above-mentioned threshold value decreased with an increase in operating frequency. The amplitude and phase profile of the Bz component of the RF wave indicates the presence of waves reflected from the bottom flange and the local minimum of the electron concentration within the junction of the gas-discharge and process chambers.

中文翻译：

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置于弱外磁场中的双室射频感应等离子体源中的射频场结构

摘要 对电感小于70 Gs的磁场中低压感应射频放电激发波的结构进行了实验研究。工作中使用了由气体放电室和处理室组成的等离子体源。波结构研究的结果表明，当超过一定的外部磁场感应阈值并且使用分隔气体放电室和处理室的金属法兰时，等离子体源中会激发部分行波。还注意到上述阈值随着操作频率的增加而降低。