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Programmable synchronization enhanced MEMS resonant accelerometer
Microsystems & Nanoengineering ( IF 7.9 ) Pub Date : 2020-07-27 , DOI: 10.1038/s41378-020-0170-2
Liu Xu 1 , Shudong Wang 1 , Zhuangde Jiang 1 , Xueyong Wei 1
Affiliation  

Acceleration measurement is of great significance due to its extensive applications in military/industrial fields. In recent years, scientists have been pursuing methods to improve the performance of accelerometers, particularly through seeking new sensing mechanisms. Herein, we present a synchronized oscillator-based enhancement approach to realize a fivefold resolution improvement of a microelectromechanical resonant accelerometer. Through the unidirectional electrical coupling method, we achieved synchronization of the sensing oscillator of the microelectromechanical resonant accelerometer and an external reading oscillator, which remarkably enhanced the stability of the oscillation system to 19.4 ppb and the resolution of the accelerometer to 1.91 μg. In addition, the narrow synchronization bandwidth of conventional synchronized oscillators was discussed, and hence, we propose a novel frequency automatic tracking system to expand the synchronization bandwidth from 113 to 1246 Hz, which covers the full acceleration measurement range of ±1 g. For the first time, we utilized a unidirectional electrical synchronization mechanism to improve the resolution of resonant sensors. Our comprehensive scheme provides a general and powerful solution for performance enhancement of any microelectromechanical system (MEMS) resonant sensor, thereby enabling a wide spectrum of applications.



中文翻译:

可编程同步增强型 MEMS 谐振加速度计

加速度测量因其在军事/工业领域的广泛应用而具有重要意义。近年来,科学家们一直在寻求提高加速度计性能的方法,特别是通过寻找新的传感机制。在这里,我们提出了一种基于同步振荡器的增强方法,以实现微机电谐振加速度计的五倍分辨率提高。通过单向电耦合方式,我们实现了微机电谐振加速度计的传感振荡器与外部读数振荡器的同步,显着提高了振荡系统的稳定性至19.4 ppb,将加速度计的分辨率提高至1.91 μg。此外,讨论了传统同步振荡器的窄同步带宽,因此,我们提出了一种新颖的频率自动跟踪系统,将同步带宽从 113 Hz 扩展到 1246 Hz,覆盖±1 g 的全加速度测量范围。我们第一次利用单向电同步机制来提高谐振传感器的分辨率。我们的综合方案为任何微机电系统 (MEMS) 谐振传感器的性能增强提供了通用且强大的解决方案,从而实现了广泛的应用。我们利用单向电同步机制来提高谐振传感器的分辨率。我们的综合方案为任何微机电系统 (MEMS) 谐振传感器的性能增强提供了通用且强大的解决方案,从而实现了广泛的应用。我们利用单向电同步机制来提高谐振传感器的分辨率。我们的综合方案为任何微机电系统 (MEMS) 谐振传感器的性能增强提供了通用且强大的解决方案,从而实现了广泛的应用。

更新日期:2020-07-27
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