Silver nanostructures are of interest to be used in hybrid thin‐film structures with various materials. In this work, we analyse 3D AFM images of granulated silver film nanostructures prepared by thermal evaporation. The advanced AFM data study aims to understand how film thickness and postannealing affect the nanostructure morphology changes. For the first time, the evaluation of surface statistical parameters and fractal geometry were used to characterise the nanostructure morphology of Ag island films. The samples with gravimetric thickness of 2, 4 and 10 nm were analysed before and after annealing at 200°C for 10 min. The statistical processing revealed the essential variation of parameters with Ag film thickness increment and as a postannealing result. The nonmonotonic variation of surface roughness, skewness and fractal dimensions were found. It is caused by the features of the film growth process with the thickness increment and thermally activated diffusion of Ag nanoparticles during annealing.

中文翻译：

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用于薄膜混合结构的粒状银膜的立体和分形分析

银纳米结构可用于各种材料的混合薄膜结构。在这项工作中，我们分析了通过热蒸发制备的颗粒状银膜纳米结构的 3D AFM 图像。先进的 AFM 数据研究旨在了解薄膜厚度和后退火如何影响纳米结构形态的变化。首次使用表面统计参数和分形几何的评估来表征银岛薄膜的纳米结构形态。在 200°C 退火 10 分钟之前和之后分析重量厚度为 2、4 和 10 nm 的样品。统计处理揭示了参数随 Ag 膜厚度增加和作为后退火结果的基本变化。发现了表面粗糙度、偏度和分形维数的非单调变化。