Abstract

Poly-para-xylylene C (Parylene C) and Aluminium Nitride (AlN) multilayered thin films using a single chamber are proposed to achieve transparent passivation for organic light-emitting diodes (OLED). Parylene C-AlN multilayered thin films were obtained through a sequential deposition of Parylene C layers by an optimized chemical vapor deposition as well as deposition of AlN layers by radio frequency reactive sputtering within a short process time at room temperature. An OLED passivated with the thin film showed a significant extension of shelf-life of 400 h at 25 °C and 30% RH without any formation of dark spots during the shelf-life analysis, while a reference OLED without any passivation film was degraded within 24 h. In addition, the multilayered passivation films exhibited considerable optical transparency with transmittance greater than 85% in the visible range. This result demonstrates that Parylene C-AlN multilayered films can be successfully deposited within a short time at room temperature in a single chamber for passivation applications in transparent flexible OLEDs and other organic electronic devices.

Graphic Abstract

中文翻译：

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使用单个沉积腔室的有机发光二极管的Parylene C-AlN多层薄膜钝化

摘要

为了实现有机发光二极管（OLED）的透明钝化，提出了使用单室的聚对亚二甲苯基C（Parylene C）和氮化铝（AlN）多层薄膜。通过在优化的化学气相沉积中依次沉积聚对二甲苯C层，以及在室温下短时间内在射频反应溅射中沉积AlN层，从而获得聚对二甲苯C-AlN多层薄膜。钝化有薄膜的OLED在25°C和30％RH的条件下显示400h的显着延长的货架寿命，而在货架寿命分析期间没有任何黑点的形成，而没有任何钝化膜的参比OLED则在24小时 此外，多层钝化膜表现出相当高的光学透明性，在可见光范围内的透射率大于85％。该结果表明，Parylene C-AlN多层膜可以在室温下短时间内成功地在单个腔室中沉积，用于钝化应用在透明柔性OLED和其他有机电子设备中。

图形摘要