Polymethyl Methacrylate (PMMA) nanochannels are becoming increasingly important for biological, optical and electronic applications. To form a complete PMMA nanochannel/device, the open nanotrench will always be thermal bonded. However, the bonding process which influences the final fabrication precision of PMMA devices has not yet been studied systematically by numerical simulation. In this work, an elastic–plastic model was used for PMMA nanochannel bonding. The influence of temperature, pressure, aspect ratio, and friction coefficient on the dimension loss and max stress was studied systematically. By numerical simulation, all the main influence factors were optimized. It is expected that the proposed simulation method has a high potential for the polymer bonding process analysis.

中文翻译：

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PMMA纳米通道粘合的数值研究

聚甲基丙烯酸甲酯 (PMMA) 纳米通道在生物、光学和电子应用中变得越来越重要。为了形成完整的 PMMA 纳米通道/器件，开放的纳米沟槽将始终进行热粘合。然而，影响PMMA器件最终制造精度的键合工艺尚未通过数值模拟系统地研究。在这项工作中，弹塑性模型用于 PMMA 纳米通道键合。系统研究了温度、压力、纵横比和摩擦系数对尺寸损失和最大应力的影响。通过数值模拟，对所有主要影响因素进行了优化。预计所提出的模拟方法对聚合物键合过程分析具有很高的潜力。