A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams (ITBs) and four piezoresistors. To investigate how the elastic silicon membrane affects pressure sensitive characteristics, simulation models based on ANSYS 15.0 software were used to analyze the effect of structural dimension on the characteristics of pressure sensor. According to that, the chips of micro-pressure sensors were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with [Formula: see text] orientation. The experimental results show that the proposed sensor achieves a better sensitivity of 9.64 mV/kPa and an excellent linearity of 0.09%F.S. in the range of 0–3.0 kPa at room temperature and a supply voltage of 5.0 V, with a super temperature coefficient of sensitivity (TCS) about - 2180 ppm/[Formula: see text] from −40[Formula: see text] to 85[Formula: see text] and low pressure measurement less than 3.0 kPa.

中文翻译：

---

等腰梯形梁膜微压力传感器的仿真、制作工艺及特性研究

本文提出了一种具有等腰梯形梁膜（ITBM）的微压力传感器，由方形硅膜、四个等腰梯形梁（ITB）和四个压敏电阻组成。为研究弹性硅膜对压敏特性的影响，采用基于ANSYS 15.0软件的仿真模型，分析结构尺寸对压力传感器特性的影响。据此，微压力传感器芯片是通过微机电系统（MEMS）技术在具有[公式：见正文]取向的硅晶片上制造的。实验结果表明，所提出的传感器在室温和 5.0 V 电源电压下，在 0-3.0 kPa 范围内实现了 9.64 mV/kPa 的更好的灵敏度和 0.09%FS 的出色线性度，