In recent years, the demand for control of sound power and radiation patterns in personal messaging, calls, automotive entertainment, and gaming has brought a new interest in the audio world. The aim of this paper is to investigate the feasibility of producing the sound waves in the audible range and directing them in the desired listening zone by electrostatic micro-speakers. Therefore, a capacitive circular micro-plate has been modeled as an electrostatic micro-speaker. Then a Bessel panel array has been developed using a number of these plates arranged in a square array. The equations governing the vibrations of the micro-speaker’s diaphragm, as well as radiation pattern of the sound waves, have been introduced and solved. The results have shown that the Micro-Electro Mechanical Systems (MEMS) electrostatic diaphragms have the capability of producing the directional sound in the human hearing range. Moreover, we have investigated the effect of different excitation frequencies, radii size and the number of the diaphragms as well as the inter-element spacing on the sound radiation pattern of the Bessel panel array.

中文翻译：

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静电微型扬声器在产生可听定向声音中的应用

近年来，在个人信息、通话、汽车娱乐和游戏中对声功率和辐射模式控制的需求给音频世界带来了新的兴趣。本文的目的是研究通过静电微型扬声器产生可听范围内的声波并将其引导到所需聆听区域的可行性。因此，电容式圆形微板已被建模为静电微型扬声器。然后使用排列成方形阵列的许多这些板开发了贝塞尔面板阵列。介绍并求解了控制微型扬声器振膜振动以及声波辐射模式的方程。结果表明，微机电系统（MEMS）静电膜片具有在人类听觉范围内产生定向声音的能力。此外，我们还研究了不同激励频率、半径大小和振膜数量以及元件间距对贝塞尔面板阵列声辐射模式的影响。